MORE Center

Overview of Services

The Materials for Opto/Electronics Research and Education (MORE) Center advances science and innovation with facilities for nanoscale and microscale fabrication and characterization on a wide range of materials and devices.

A hub for undergraduate and graduate research, education, and collaboration, the center has 27 tools available for both direct use and service work; in addition to a suite of thin film deposition options, the MORE Center has profilometry, ellipsometry, and microscopy characterization tools, a cleanroom facility, electron and photolithography capabilities, and inert gloveboxes for work with air sensitive materials. In thirteen years of operation, the MORE Center has amassed over 700 users from research groups across Arts and Sciences, the Case School of Engineering, the School of Dental Medicine, and the Case School of Medicine.

The MORE Center is open to internal, external academic and industrial users.

Links and Resources

1. MORE Center Webpage
2. Please contact andrew.lininger@case.edu for more information or to schedule equipment.

Available Equipment

Lithography and Processing

- Class 1000 cleanroom facilities

- N2 glovebox facilities

- (NEW) Nanoscribe 2-photon polymerization (Nanoscribe PPGT2)

- E-beam lithography (Tescan Vega)

- Contact mask aligner (Karl Suss MJB3)

- Reactive ion etcher (Plasma Etch)

- UV-ozone cleaner (Novascan)

- Rapid thermal annealer (Ulvac-Riko Mila 5000)

- Vacuum oven on benchtop and in N2 glovebox (Fisher Scientific)

- Acid fume hood with HF capabilities

Deposition

- Angstrom EvoVac PVD system with thermal, e-beam, and DC/RF sputtering capabilities

- Spin coater in fume hood and N2 glovebox (Laurell)

Characterization

- Spectroscopic ellipsometer (Horiba UVISEL)

- Optical profilometer (Zygo NewView / Nanovea ST400)

- Stylus profilometer (KLA Tencor P6)

- Scanning Electron Microscope (Tescan Vega)

- Microindenter (Nanovea PB1000)

- Spectrofluorometer (Horiba Nanolog)

- UV-Vis Spectrophotometer (Ocean Optics / Shimadzu)

- Contact angle goinometer

- Micromanipulator probe station (Micromanipulator)

- PV quantum efficiency (PV Measurements QEX10)

- IV station (Oriel Sol 2A and Keithly 2400)

Location and hours of operation

Available Processes

- Metallic and oxide thin-film deposition

- Polymer / solution deposition

- Photolithography

- E-beam lithography

- Multi-step fabrication processes

- Air or moisture-sensitive processes

- Topography  / geometry characterization

- Materials characterization

- Electrical characterization

Contacts

Map