Microfabrication Laboratory (MFL)

Overview of Services

About Us

The Microfabrication Laboratory (MFL) is part of the Case School of Engineering, and is professionally staffed and managed. We serve investigators from a number of departments within the University as well as external organizations looking for prototype fabrication and R&D services. The MFL is a 5500 sq. ft. class 100 clean room facility that facilitates the fabrication of microelectromechanical systems (MEMS) and other devices. Fabrication equipment used in the measurement, deposition, patterning, etching, and heat treatment of microelectronic devices is available.

Services

• Direct access to microfabrication based equipment
• Access to experienced microfabrication engineer

Equipment and Technology Photolithography

• Karl Suss MA6 Mask Aligner
• Brewer Science Spin Coater
• Laurell Technologies Spin Coater
• YES HMDS (hexamethyldisilizane) Oven

Metal Deposition

• Denton Vacuum Explorer 14

Thin Films Deposition

• First Nano EasyTube 3000

Etch

• M4L Oxygen Plasma Cleaner
• Wet Bench

Dielectric/Insulators

• SCS PDS 2010 Parylene Coater
• Cambridge Nanotech Atomic Layer Deposition 

Location and hours of operation

Links and Resources

Case School of Engineering

CWRU Core Facilities List

Contacts