Microfabrication Laboratory (MFL)

Overview of Services

About Us

The Microfabrication Laboratory (MFL) is part of the Case School of Engineering, and is professionally staffed and managed. We serve investigators from a number of departments within the University as well as external organizations looking for prototype fabrication and R&D services. The MFL is a 5500 sq. ft. class 100 clean room facility that facilitates the fabrication of microelectromechanical systems (MEMS) and other devices. Fabrication equipment used in the measurement, deposition, patterning, etching, and heat treatment of microelectronic devices is available.

Services

  • Direct access to microfabrication based equipment
  • Access to experienced microfabrication engineer

Equipment and Technology Photolithography

  • Karl Suss MA6 Mask Aligner
  • Brewer Science Spin Coater
  • Laurell Technologies Spin Coater
  • YES HMDS (hexamethyldisilizane) Oven

Metal Deposition

  • Denton Vacuum Explorer 14

Etch

  • M4L Oxygen Plasma Cleaner
  • March RIE
  • Wet Bench

Dielectric/Insulators

  • SCS PDS 2010 Parylene Coater
  • Cambridge Nanotech Atomic Layer Deposition 

Leadership

Christian Zorman, PhD | Director

Nichole Hoven | Managing Engineer

Location and hours of operation

Hours Location

Monday - Friday

8am - 4pm

                                    

2104 Adelbert Road

Bingham Building, Room 320, Case Western Reserve University

Cleveland, OH 44106

Links and Resources

  1. COVID-19 Campus Guidelines (.pdf) 
  2. COVID-19 Campus Communications

Contacts

Name Role Phone Email Location
Nichole Hoven
Managing Engineer
 
216.368.0264
 
nxh195@case.edu
 
CWRU, Bingham 320
 
Chris Zorman
Director
 
216.368.6117
 
caz@case.edu
 
CWRU, Nord 500