Welcome!
ALERT ATTENTION ⚠️
On Saturday April 20th, 2024 at 8:00 AM (UTC), emergency site maintenance has been scheduled for iLab Primary U.S. Details and updates can be found on the Agilent Status Page. For additional information, please contact the Agilent iLab Support by clicking on 'Help' at the top of your account page or by emailing ilab-support@agilent.com.
About Us
The Microfabrication Laboratory (MFL) is part of the Case School of Engineering, and is professionally staffed and managed. We serve investigators from a number of departments within the University as well as external organizations looking for prototype fabrication and R&D services. The MFL is a 5500 sq. ft. class 100 clean room facility that facilitates the fabrication of microelectromechanical systems (MEMS) and other devices. Fabrication equipment used in the measurement, deposition, patterning, etching, and heat treatment of microelectronic devices is available.
Services
Equipment and Technology Photolithography
Metal Deposition
Thin Films Deposition
Etch
Dielectric/Insulators
Christian Zorman, PhD | Director
Nichole Hoven | Managing Engineer
| Hours | Location |
|
Monday - Friday 8am - 4pm
|
2104 Adelbert Road Bingham Building, Room 320, Case Western Reserve University Cleveland, OH 44106 |
| Name | Role | Phone | Location | |
|---|---|---|---|---|
| Nichole Hoven |
Managing Engineer
|
216.368.0264
|
nxh195@case.edu
|
CWRU, Bingham 320
|
| Chris Zorman |
Director
|
216.368.6117
|
caz@case.edu
|
CWRU, Nord 500
|
